JPH087624Y2 - マーク付き半導体装置 - Google Patents
マーク付き半導体装置Info
- Publication number
- JPH087624Y2 JPH087624Y2 JP9989889U JP9989889U JPH087624Y2 JP H087624 Y2 JPH087624 Y2 JP H087624Y2 JP 9989889 U JP9989889 U JP 9989889U JP 9989889 U JP9989889 U JP 9989889U JP H087624 Y2 JPH087624 Y2 JP H087624Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- aluminum
- wiring
- contact hole
- function
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 58
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 55
- 229910052782 aluminium Inorganic materials 0.000 claims description 55
- 238000007740 vapor deposition Methods 0.000 claims description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 description 10
- 230000001681 protective effect Effects 0.000 description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 239000011229 interlayer Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9989889U JPH087624Y2 (ja) | 1989-08-29 | 1989-08-29 | マーク付き半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9989889U JPH087624Y2 (ja) | 1989-08-29 | 1989-08-29 | マーク付き半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0339830U JPH0339830U (en]) | 1991-04-17 |
| JPH087624Y2 true JPH087624Y2 (ja) | 1996-03-04 |
Family
ID=31648930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9989889U Expired - Lifetime JPH087624Y2 (ja) | 1989-08-29 | 1989-08-29 | マーク付き半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087624Y2 (en]) |
-
1989
- 1989-08-29 JP JP9989889U patent/JPH087624Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0339830U (en]) | 1991-04-17 |
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